info:eu-repo/semantics/article
Deposition and characterization of polymorphous germanium films prepared by low frequency PECVD
Autor
MARIO MORENO MORENO
ALFONSO TORRES JACOME
Pedro Rosales Quintero
ANDREY KOSAREV
CARLOS ZUÑIGA ISLAS
CLAUDIA REYES BETANZO
Miguel Dominguez
Resumen
In this work we have deposited polymorphous germanium (pm-Ge:H) thin films by low frequency plasma enhanced chemical vapor deposition (LF-PECVD). We have studied the effect of the deposition pressure on the structural and electric characteristics of the films. Atomic force microscopy was used to analyze the surface roughness of the pm-Ge:H films, while transmission electron microscopy was used to observe the cross section. The temperature dependence of conductivity (σ(T)), deposition rate (Vd), activation energy (Ea) and the temperature coefficient of resistance (TCR) were extracted on the pm-Ge:H films deposited at different pressure values. An optimal pressure range was found, in order to produce pm-Ge:H films with high Ea and TCR which are key parameters for thermal detection applications.
Materias
Ítems relacionados
Mostrando ítems relacionados por Título, autor o materia.
-
Three-dimensional hyperspectral camera based on near-infrared single-pixel imaging
Carlos Alexander Osorio Quero -
Innovative planar antenna designs in the microwave range
ALEJANDRO RAMIREZ MENDEZ -
Análisis de características estadísticamente significativas en el dominio temporal de señales ECG y PPG para identificación biométrica bimodal
Denisse Escarlette Mancilla Palestina