Atomic Force Microscopy: A Powerful Tool for Electrical Characterization

Abstract

The fundamental principle of atomic force microscopy (AFM) is to obtain images of a surface by measuring deflections on a nanoscale probe. In its more than 25-year history, AFM has had its scope rapidly expanded to various scientific fields. Several techniques derived from this microscopy have appeared in recent years, providing additional information to the topographical images and enabling the investigation of chemical and physical properties of materials. This chapter will address the concepts and principles of AFM, as well as various aspects related to electrical nanocharacterization, using specific techniques such as electrostatic force microscopy (EFM) and scanning surface potential microscopy (SSPM).