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Photoluminescence enhancement through silicon implantation on SRO-LPCVD films
(Elsevier B.V., 2010)
Low-temperature deposition of silicon oxide and silicon nitride by reactive magnetron sputtering
(ELSEVIER SCI LTD, 2009)
In this study, oxide and nitride films were deposited at room temperature through the reaction of silicon Sputtered by argon and oxygen ions or argon and nitrogen ions at 250 and 350 W with 0.67 Pa pressure. It was observed ...
FTIR and photoluminescence of annealed silicon rich oxide films
(Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales, 2009)
A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
(Elsevier B.V., 2009)