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Thermal expansion coefficient, mechanical and structural properties of hydrogenated carbon nitrides
(Elsevier Science SaLausanneSuíça, 2012)
Coefficient of thermal expansion and elastic modulus of thin films
(Amer Inst PhysicsMelvilleEUA, 1999)
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(TRANS TECH PUBLICATIONS LTD, 2009)
Amorphous SiC(x)N(y) films have been deposited on (100) Si substrates by RF magnetron sputtering of a SiC target in a variable nitrogen-argon atmosphere. The as-deposited films were submitted to thermal anneling in a furnace ...
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2009-01-01)
Amorphous SiC(x)N(y) films have been deposited on (100) Si substrates by RF magnetron sputtering of a SiC target in a variable nitrogen-argon atmosphere. The as-deposited films were submitted to thermal anneling in a furnace ...
Tool steel ion beam assisted nitrocarburization
(Elsevier Science SaLausanneSuíça, 2007)
Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor deposition
(ELSEVIER SCIENCE SA, 2010)
Thin silicon nitride films were prepared at 350 degrees C by inductively coupled plasma chemical vapor deposition on Si(100) substrates under different NH(3)/SiH(4) or N(2)/SiH(4) gas mixture. The chemical composition and ...
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2014)
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2014)
X-ray photoelectron spectroscopy analysis of zirconium nitride-like films prepared on Si(100) substrates by ion beam assisted deposition
(ELSEVIER SCIENCE SA, 2008)
Thin zirconium nitride films were prepared on Si(l 00) substrates at room temperature by ion beam assisted deposition with a 2 keV nitrogen ion beam. Arrival rate ratios ARR(N/Zr) used were 0.19, 0.39, 0.92, and 1.86. The ...