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Estudo sobre a formação da solução sólida em filmes finos de zrn+si depositados via magnetron sputtering reativoStudy on the formation of the solid solution in zrn+si thin films deposited via reactive magnetron sputtering
(Pós-Graduação em Ciência e Engenharia de MateriaisUniversidade Federal de Sergipe (UFS), 2023)
Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
Hydrogen influence on gallium arsenide thin films prepared by rf-magnetron sputtering technique
(Sociedade Brasileira Fisica, 2006-09-01)
We investigate the effect of the hydrogen intentional incorporation on the structural properties of the amorphous gallium arsenide prepared by rf-magnetron sputtering technique. The properties of the non-hydrogenated films ...
Hydrogen influence on gallium arsenide thin films prepared by rf-magnetron sputtering technique
(Sociedade Brasileira Fisica, 2006-09-01)
We investigate the effect of the hydrogen intentional incorporation on the structural properties of the amorphous gallium arsenide prepared by rf-magnetron sputtering technique. The properties of the non-hydrogenated films ...
Influência da temperatura do substrato na estrutura de filmes finos de ZrxSi1-XN depositados por magnetron sputtering reativoInfluence of substrate temperature on the structure of ZrxSi1-XN thin films deposited by reactive magnetron sputtering
(Pós-Graduação em Ciência e Engenharia de MateriaisUniversidade Federal de Sergipe (UFS), 2023)
Influência do teor de Hf em filmes finos de Zr e ZrN depositados por magnetron sputteringInfluence of Hf content in thin films of Zr and ZrN deposited by magnetron sputtering
(Pós-Graduação em Ciência e Engenharia de MateriaisUniversidade Federal de Sergipe, 2019)
Deposição e caracterização de filmes finos TaA1N por magnetron sputtering reativoDeposition and characterization of TaA1N thin films by reactive magnetron sputtering
(Universidade Federal de SergipePós-Graduação em Ciência e Engenharia de MateriaisBrasilUFS, 2017)
Alternative anode geometry for magnetron sputtering
(2020-12-01)
Anode geometry can play a crucial role in magnetron sputtering deposition. In this work, we investigated the use of five different ring anodes placed in front of the target. Their effects in the current-voltage relations ...