Artigo de peri??dico
Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition
Registro en:
0257-8972
20
204
Autor
GOMEZ, A.G.
RECCO, A.A.C.
LIMA, N.B.
MARTINEZ, L.G.
TSCHIPTSCHIN, A.P.
SOUZA, R.M.