Simultaneous measurement of deformation and thickness change in polymer films

Torga, Jorge; Morel, Eneas

info:eu-repo/semantics/article

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Eneas N. Morel and Jorge R. Torga "Simultaneous measurement of deformation and thickness change in polymer films", Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); https://doi.org/10.1117/12.680546

http://hdl.handle.net/20.500.12272/4284

10.1117/12.680546

https://repositorioslatinoamericanos.uchile.cl/handle/2250/8546473

Author

Torga, Jorge

Morel, Eneas

Institutions

Universidad Tecnológica Nacional (Argentina)

Abstract

We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtained

Fil: Torga, Jorge. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina

Fil: Morel, Eneas. Universidad Tecnológica Nacional. Facultad Regional Delta.; Argentina

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