Articulo
Surface-relief micropatterning of zinc oxide substrates by micromolding pulsed-laser-deposited films
Registro en:
issn:0947-8396
issn:1432-0630
issn:1996-0948
Autor
Azzaroni, Omar
Schilardi, Patricia Laura
Salvarezza, Roberto Carlos
Manuel-Herrero, J.
Zaldo, Carlos
Vázquez, Luis
Institución
Resumen
Surface-relief patterning of semiconductor surfaces has become a very active research topic during the last few years. This growing interest is related to the wide range of technological applications of patterned semiconductor surfaces, with particular emphasis on photovoltaic technology. In this work, we show a straightforward, cost-effective and non-hard lithographic approach for transferring surface-relief micropatterns on ZnO surfaces. The method is based on direct micromolding of pulsed-laser deposited ZnO films using surface-modified metallic micromolds. In contrast to those obtained by photolithographic techniques, direct micromolded ZnO surfaces are characterized by very low roughness values on the transferred relief patterns. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas