Fourier transform methods applied to an optical heterodyne profilometer
dc.contributor | Beltr�n-Gonz�lez, A., Departamento de Electr�nica, Universidad de Guadalajara, Av. Revoluci�n 1500, 44430 Guadalajara, Jal., Mexico; Garc�a-Torales, G., Departamento de Electr�nica, Universidad de Guadalajara, Av. Revoluci�n 1500, 44430 Guadalajara, Jal., Mexico; Mart�nez-Ponce, G., Centro de Investigaciones en �ptica, Apdo. Postal 1-948, 37000 Le�n-Gto., Mexico | |
dc.creator | Beltran-Gonzalez, A. | |
dc.creator | Garcia-Torales, G. | |
dc.creator | Martinez-Ponce, G. | |
dc.date.accessioned | 2015-09-15T18:00:07Z | |
dc.date.accessioned | 2023-07-03T22:12:19Z | |
dc.date.available | 2015-09-15T18:00:07Z | |
dc.date.available | 2023-07-03T22:12:19Z | |
dc.date.created | 2015-09-15T18:00:07Z | |
dc.date.issued | 2013 | |
dc.identifier | http://www.scopus.com/inward/record.url?eid=2-s2.0-84891342644&partnerID=40&md5=a2abc2c506aa4f0828f3f05b6470a5eb | |
dc.identifier | http://hdl.handle.net/20.500.12104/41589 | |
dc.identifier | 10.1117/12.2025887 | |
dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/7244406 | |
dc.description.abstract | In this work, theory and experiment describe the performance of a surface profile measurement device based on optical heterodyne interferometry are presented. The object and reference beams propagating through the interferometer are obtained by single-pass through an acousto-optic modulator. The diffraction orders 0 and the Doppler-shifted +1 (object and reference beams, respectively) are manipulated to propagate collinearly towards the interferometer output where a fast photodetector is placed to collect the irradiance. The modulated optical signal is Fourier transformed using a data acquisition card and RF communications software. The peak centered at the acousto-optic frequency in the power spectrum is filtered and averaged. The irregularities on the surface of the reflective sample are proportional to the height of this peak. The profile of a reflective blazed grating has been sketched by translating laterally the sample using a nanopositioning system. Experimental results are compared to the measurement done with a scanning electron microscope. There has been found a good agreement between both methods. � 2013 SPIE. | |
dc.relation | Scopus | |
dc.relation | Proceedings of SPIE - The International Society for Optical Engineering | |
dc.relation | 8785 | |
dc.title | Fourier transform methods applied to an optical heterodyne profilometer | |
dc.type | Conference Paper |