info:eu-repo/semantics/article
Basic mechanisms for hillock formation during etching
Fecha
2008-03Registro en:
Mirabella, D. A.; Suarez, Maria Patricia; Aldao, Celso Manuel; Basic mechanisms for hillock formation during etching; Elsevier Science; Physica A: Statistical Mechanics and its Applications; 387; 8-9; 3-2008; 1957-1962
0378-4371
CONICET Digital
CONICET
Autor
Mirabella, D. A.
Suarez, Maria Patricia
Aldao, Celso Manuel
Resumen
The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.