Artigo
Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process
Fecha
2001-10-01Registro en:
Journal of Materials Research, v. 16, n. 10, p. 3009-3013, 2001.
0884-2914
10.1557/JMR.2001.0413
WOS:000171429600039
2-s2.0-0035494725
2-s2.0-0035494725.pdf
Autor
Universidade Estadual Paulista (Unesp)
Resumen
Strontium barium niobate (SBN) thin films were crystallized by conventional electric furnace annealing and by rapid-thermal annealing (RTA) at different temperatures. The average grain size of films was 70 nm and thickness around 500 nm. Using x-ray diffraction, we identified the presence of polycrystalline SBN phase for films annealed from 500 to 700 °C in both cases. Phases such as SrNb2O6 and BaNb2O6 were predominantly crystallized in films annealed at 500 °C, disappearing at higher temperatures. Dielectric and ferroelectric parameters obtained from films crystallized by conventional furnace and RTA presented essentially the same values.