CHARACTERIZATION OF ION BEAMS EMITTED FROM A LOW ENERGY PLASMA FOCUS (< 1KJ) AND ITS IMPLANTATION ON WAFERS

dc.contributorUniversidad de Antofagasta
dc.date.accessioned2016-10-19T22:25:03Z
dc.date.accessioned2018-06-13T21:32:15Z
dc.date.available2016-10-19T22:25:03Z
dc.date.available2018-06-13T21:32:15Z
dc.date.created2016-10-19T22:25:03Z
dc.date.issued2013
dc.identifierhttp://hdl.handle.net/10533/118927
dc.identifier1130787
dc.identifierM
dc.identifier9417297
dc.identifier7
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1516961
dc.relationhandle/10533/111555
dc.relationinfo:eu-repo/grantAgreement/Fondecyt/1130787
dc.relationhandle/10533/111541
dc.relationhandle/10533/108045
dc.relationinstname: Conicyt
dc.relationreponame: Repositorio Digital RI2.0
dc.rightsinfo:eu-repo/semantics/openAcces
dc.rightsinfo:eu-repo/semantics/openAcces
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 Chile
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/3.0/cl/
dc.titleCHARACTERIZATION OF ION BEAMS EMITTED FROM A LOW ENERGY PLASMA FOCUS (< 1KJ) AND ITS IMPLANTATION ON WAFERS
dc.typeProyecto


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