Artículos de revistas
Saxs Analysis Of Graphitic Amorphous Carbon
Registro en:
Thin Solid Films. , v. 516, n. 02/04/15, p. 316 - 319, 2007.
406090
10.1016/j.tsf.2007.06.081
2-s2.0-36049000168
Autor
Oliveira Jr. M.H.
Barbieri P.F.
Torriani I.L.
Marques F.C.
Institución
Resumen
We report on the study of amorphous carbon films using the small angle X-ray scattering (SAXS) technique. The films were deposited by ion beam assisted deposition at different assisting ion energies, ranging from 50 eV to 200 eV. The film density was determined by Rutherford back-scattering (RBS) and the film thickness was measured by a stylus profilometer. The film density increases as the assisting ion energy used during deposition increases. Small angle X-ray scattering results revealed large scatter centers within the matrix, increasing in size with assisting ion energy. The mean distance between those centers was found to be about 2.5 nm independent of the deposition conditions. The gyration radius (Rg) is in the 18 nm to 25 nm range, while the film is about 100 nm thick. © 2007 Elsevier B.V. All rights reserved. 516 02/04/15 316 319 Robertson, J., (2001) Phys. Status Solidi, A Appl. Res., 186, p. 177 Potter, D.I., Rossouw, C.J., (1989) J. Nucl. Mater. Sci., 161, p. 124 Vom Felde, A., Fink, J., Müller-Heinzerling, Th., Pflüger, J., Scheerer, B., Linker, G., Kaletta, D., (1984) Phys. Rev. Lett., 53, p. 922 Templer, C., Garem, H., Riviere, J.P., Delafond, J., (1986) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms, 18, p. 24 Templer, C., Garem, H., Riviere, J.P., (1986) Philos. Mag., A, 53, p. 667 Faraci, G., Pennisi, A.R., Terrasi, A., (1988) Phys. Rev., B, 38, p. 13468 Lacerda, R.G., dos Santos, M.C., Tessler, L.R., Alvarez, F., Marques, F.C., (2003) Phys. Rev., B, 68, p. 054104 Stoney, G.C., (1909) Proc. R. Soc. Lond., A, 32, p. 172 Lifshitz, Y., Lempert, G.D., Grossman, E., Avigal, I., Uzan-Saguy, C., Kalish, R., Kulik, J., Rabais, J.W., (1995) Diamond Relat. Mater., 4, p. 318 Fallon, P.J., Veerasamy, V.S., Davis, C.A., Robertson, J., Amaratunga, G.A.J., Milne, W.I., Koskinen, J., (1993) Phys. Rev., B, 48, p. 4777 Jacobsohn, L.G., Capote, G., Maia as Costa, M.E.H., Franceschini, D.F., Freire Jr., F.L., (2002) Diamond Rel. Mater., 11, p. 1946 Svergun, D.I., (1992) J. Appl. Crystallogr., 25, p. 495 Glatter, O., Kratky, O., (1982) Small Angle X-ray Scattering, , Academic Press, London Halgren, T.A., Gadzuk, J.W., Herbst, J.F., (1978) Phys. Rev. Lett., 41, p. 583 Robertson, J., O'Reilly, E.P., (1987) Phys. Rev., B, 35, p. 2946