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Structural and morphological studies on SiOxNy thin films
(ELSEVIER, 2008-05-01)
In this work, the structure and morphology of silicon oxynitride films deposited by the PECVD technique were studied. The films were deposited under two different conditions: (a) SiOxNy with chemical compositions varying ...
Characterization of SixOyNz coating on CF/PPS composites for space applications
(2018-02-15)
This work deals with the processing and surface treatment of thermoplastic composites carbon fibers/Polyphenylene sulfide (CF/PPS) for aerospace applications. After the production of the thermoplastic composites through ...
Analysis and measurement of the non-linear refractive index of SiOxNy using pedestal waveguides
(Ieee, 2019-01-01)
In this work, the non-linear refractive index (n(2)) of silicon oxynitride (SiOxNy) is determined, obtaining a value for this material of n(2) = 2.11x10(-19) m(2)/W. The results demonstrate that this material has interesting ...
Analysis and measurement of the non-linear refractive index of SiOx Ny using pedestal waveguides
(2019-08-01)
In this work, the non-linear refractive index (n2) of silicon oxynitride (SiOx Ny) is determined, obtaining a value for this material of n2 = 2.11×10-19 m2/W. The results demonstrate that this material has interesting ...
Glasses in the Si-O-C-N system produced by pyrolysis of polycyclic silazane/siloxane networks
(Elsevier Science BvAmsterdamHolanda, 2007)
Oxynitride films formed by low energy NO+ implantation into silicon
(Amer Inst PhysicsWoodbury, 1996)
Characterization and modeling of antireflective coatings of SiO2, Si3N4, and SiOxNy deposited by electron cyclotron resonance enhanced plasma chemical vapor deposition
(A V S Amer Inst PhysicsMelvilleEUA, 2006)