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Controlled route to the fabrication of carbon and boron nitride nanoscrolls: A molecular dynamics investigation
(2013-02-07)
Carbon nanoscrolls (graphene layers rolled up into papyrus-like tubular structures) are nanostructures with unique and interesting characteristics that could be exploited to build several new nanodevices. However, an ...
Controlled route to the fabrication of carbon and boron nitride nanoscrolls: A molecular dynamics investigation
(2013-02-07)
Carbon nanoscrolls (graphene layers rolled up into papyrus-like tubular structures) are nanostructures with unique and interesting characteristics that could be exploited to build several new nanodevices. However, an ...
Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor deposition
(ELSEVIER SCIENCE SA, 2010)
Thin silicon nitride films were prepared at 350 degrees C by inductively coupled plasma chemical vapor deposition on Si(100) substrates under different NH(3)/SiH(4) or N(2)/SiH(4) gas mixture. The chemical composition and ...
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(TRANS TECH PUBLICATIONS LTD, 2009)
Amorphous SiC(x)N(y) films have been deposited on (100) Si substrates by RF magnetron sputtering of a SiC target in a variable nitrogen-argon atmosphere. The as-deposited films were submitted to thermal anneling in a furnace ...
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2014)
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2009-01-01)
Amorphous SiC(x)N(y) films have been deposited on (100) Si substrates by RF magnetron sputtering of a SiC target in a variable nitrogen-argon atmosphere. The as-deposited films were submitted to thermal anneling in a furnace ...
Electrical and Mechanical Properties of Post-annealed SiC(x)N(y) Films
(Trans Tech Publications Ltd, 2014)