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Estudo sobre a formação da solução sólida em filmes finos de zrn+si depositados via magnetron sputtering reativoStudy on the formation of the solid solution in zrn+si thin films deposited via reactive magnetron sputtering
(Pós-Graduação em Ciência e Engenharia de MateriaisUniversidade Federal de Sergipe (UFS), 2023)
Stability of the Photocatalytic Activity of TiO2 Deposited by Reactive Sputtering
(ABM, ABC, ABPol, 2021-07-05)
The photocatalytic activity and stability of TiO2 thin films deposited by reactive sputtering were evaluated through many cycles of aqueous methylene blue solutions photodegradation. Tests were performed in TiO2 films ...
Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
Niobium oxide films deposited by reactive sputtering: Effect of oxygen flow rate
(2019-01-01)
Reactive sputtering is a versatile technique used to form compact films with excellent homogeneity. In addition, it allows easy control over deposition parameters such as gas flow rate that results in changes on composition ...
Influence of the oxygen consumption on the crystalline structure of titanium oxides thin films prepared by DC reactive magnetron sputtering
(Elsevier, 2018-08)
In the present work, a simple route to control the growth of different crystalline titanium oxides thin films prepared by reactive sputtering is reported. Using the film pumping speed, the oxygen consumption or "oxygen ...
Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction.
(Laboratório Nacional de Luz SíncrotronCampinas, 2013-02-26)
Reactive Sputter Magnetron (RSM) is a widely used technique to thin films growing
of compounds both, in research laboratories and in industrial processes. The nature
of the deposited compound will depend then on the ...
Electro-optically sensitive diamond-like carbon thin films deposited by reactive magnetron sputtering for electronic device applications
(ELSEVIER SCIENCE SA, 2011)
The goal of this work is to study and relate electrical and optical properties of diamond-like carbon (DLC) thin films for applications in electronic devices. DLC films were deposited in a reactive RF magnetron sputtering ...