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Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma
(Elsevier B.V. Sa, 2011-11-15)
Hydrogenated amorphous carbon (a-C:H) films were grown at room temperature on glass and polished silicon substrates using RF-PECVD (Radio-Frequency Plasma Enhanced Chemical Vapor Deposition). Plasmas composed by 30% of ...
Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma
(Elsevier B.V. Sa, 2011-11-15)
Hydrogenated amorphous carbon (a-C:H) films were grown at room temperature on glass and polished silicon substrates using RF-PECVD (Radio-Frequency Plasma Enhanced Chemical Vapor Deposition). Plasmas composed by 30% of ...
Optical and structural properties of PEO-like plasma polymers
(Taylor & Francis Ltd, 2002-01-01)
This paper deals with the study of optical, structural and biocompatible properties of PEO-like plasma polymerized films resulting from RF excited diethylene glycol dimethyl ether (CH3O(CH2CH2O)(2)CH3 diglyme) glow discharges. ...
Optical and structural properties of PEO-like plasma polymers
(Taylor & Francis Ltd, 2002-01-01)
This paper deals with the study of optical, structural and biocompatible properties of PEO-like plasma polymerized films resulting from RF excited diethylene glycol dimethyl ether (CH3O(CH2CH2O)(2)CH3 diglyme) glow discharges. ...
Conversão de Evaporadora a Vácuo em Sistema de Plasma e Sputtering DC /RF
(Seminário de Iniciação Científica e Tecnológica da UTFPR, 2017)
Medical polyurethane covered by diglyme plasma polymer
(2015-01-01)
Plasma polymerized diglyme (pp-diglyme) is a promising class of biomedical materials due to hydrophilic features when deposited under excitation by RF low power. In order to reach this goal this paper deals with plasma ...
Study of RF-excited Diethylene Glycol Dimethyl Ether Plasmas by Mass Spectrometry
(Iop Publishing Ltd, 2012-01-01)
This paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (CH3O(CH2CH2O)(2)CH3) (diglyme here in) molecule in low pressure RF excited plasma discharges. The study was carried out using ...