comunicación de congreso
Spectroscopic characterization of RF hydrocarbon plasmas for DLC coatings
Spectroscopic characterization of RF hydrocarbon plasmas for DLC coatings
Fecha
2014Registro en:
10.1088/1742-6596/511/1/012017
1742-6596
2-s2.0-84901594816
Autor
Guzmán, F.
Ruiz, M.
Valderrama, E.
Favre Domínguez, Mario
Bhuyan, Heman
Wyndham, Edmund
Chuaqui, Hernán