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Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
(IEEE, 2012-12-01)
In this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson ...