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Optical emission end point detecting for monitoring oxygen plasma a-C : H stripping
(Pergamon-elsevier Science LtdOxfordInglaterra, 1998)
Molds and resists studies for nanoimprint lithography of electrodes in low-voltage polymer thin-film transistors
(SpringerNew York, 2014-05)
A low-cost patterning of electrodes was investigated looking forward to replacing conventional photolithography for the processing of low-operating voltage polymeric thin-film transistors. Hard silicon, etched by sulfur ...
Nanoporous thin films in optical waveguide spectroscopy for chemical analytics
(Springer Heidelberg, 2020-02-27)
Spectroscopy with planar optical waveguides is still an active field of research for the quantitative analysis of various supramolecular surface architectures and processes, and for applications in integrated optical chip ...
PMMA-Assisted Plasma Patterning of Graphene
(Hindawi Limited, 2018)
Microelectronic fabrication of Si typically involves high-temperature or high-energy processes. For instance, wafer fabrication, transistor fabrication, and silicidation are all above 500°C. Contrary to that tradition, we ...
Quantum atomic lithography via cross-cavity optical Stern-Gerlach setup
(Optical Society of America - OSAWashington, DC, 2014-10)
We present a fully quantum scheme to perform two-dimensional atomic lithography based on a cross-cavity optical Stern-Gerlach setup: an array of two mutually orthogonal cavities crossed by an atomic beam perpendicular to ...
Replication of submicrometric organized structures of block copolymer from coordination-polymer templates
(American Scientific Publishers - ASPValencia, 2013-05)
This paper presents fabrication of a submicrometric template obtained from self-organized well-ordered pattern of nanostructured (poly(styrene)-b-poly(ethene-co-butene)-b-poly(styrene) (SEBS) copolymer. The SEBS ordered ...
Gold-implanted shallow conducting layers in polymethylmethacrylate
(AMER INST PHYSICS, 2009)
PMMA (polymethylmethacrylate) was ion implanted with gold at very low energy and over a range of different doses using a filtered cathodic arc metal plasma system. A nanometer scale conducting layer was formed, fully buried ...