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Mechanical and tribological properties of a-C:H:F Thin Films
(2013-07-01)
a-C:H films were grown by plasma-enhanced chemical vapor deposition in atmospheres composed by 30 % of acetylene and 70 % of argon. Radiofrequency signal (RF) was supplied to the sample holder to generate the depositing ...
Carbon nanotubes produced from hexane and ethanolCarbon nanotubes produced from hexane and ethanol
(Revista Mexicana de Física, 2009)
Thin film deposition with time-varying temperature
(2013)
We study the effects of time-dependent substrate/film temperature in the deposition of a mesoscopically thick film using a statistical model that accounts for diffusion of adatoms without lateral neighbors whose coefficients ...
Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor deposition
(ELSEVIER SCIENCE SA, 2010)
Thin silicon nitride films were prepared at 350 degrees C by inductively coupled plasma chemical vapor deposition on Si(100) substrates under different NH(3)/SiH(4) or N(2)/SiH(4) gas mixture. The chemical composition and ...
Method of porous diamond deposition on porous silicon
(Elsevier Science BvAmsterdamHolanda, 2001)
Synthesis of carbon nanotubes directly over TEM grids aiming the study of nucleation and growth mechanisms
(Elsevier Science BvAmsterdamHolanda, 2008)