dc.contributorUniversidade Estadual Paulista (UNESP)
dc.creatorBoratto, Miguel Henrique
dc.creatorScalvi, Luis Vicente de Andrade
dc.creatorMachado, Diego Henrique de Oliveira
dc.date2015-11-03T15:30:00Z
dc.date2016-10-25T21:18:39Z
dc.date2015-11-03T15:30:00Z
dc.date2016-10-25T21:18:39Z
dc.date2014-01-01
dc.date.accessioned2017-04-06T09:18:33Z
dc.date.available2017-04-06T09:18:33Z
dc.identifierElectroceramics Vi. Stafa-zurich: Trans Tech Publications Ltd, v. 975, p. 248-253, 2014.
dc.identifier1022-6680
dc.identifierhttp://hdl.handle.net/11449/130182
dc.identifierhttp://acervodigital.unesp.br/handle/11449/130182
dc.identifierhttp://dx.doi.org/10.4028/www.scientific.net/AMR.975.248
dc.identifierWOS:000348023200041
dc.identifierhttp://www.scientific.net/AMR.975.248
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/940729
dc.descriptionAlumina thin films have been obtained by resistive evaporation of Al layer, followed by thermal oxidation achieved by annealing in appropriate atmosphere (air or O-2-rich), with variation of annealing time and temperature. Optical and structural properties of the investigated films reveal that the temperature of 550 degrees C is responsible for fair oxidation. Results of surface electrical resistivity, Raman and infrared spectroscopies are in good agreement with this finding. X-ray and Raman data also suggest the crystallization of Si nuclei at glass substrate-alumina interface, which would come from the soda-lime glass used as substrate. The main goal in this work is the deposition of alumina on top of SnO2 to build a transparent field-effect transistor. Some microscopy results of the assembled SnO2/Al2O3 heterostructure are also shown.
dc.languageeng
dc.publisherTrans Tech Publications Ltd
dc.relationElectroceramics Vi
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectAlumina
dc.subjectResistive evaporation
dc.subjectThermal annealing
dc.subjectOxidation
dc.titleAl2O3 obtained through resistive evaporation for use as insulating layer in transparent field effect transistor
dc.typeOtro


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