Aspectos da cloracao do silicio

dc.creatorSEO, E.S.M.
dc.creatorBROCCHI, E.A.
dc.creatorCARVALHO, R.J.
dc.creatorANDREOLI, M.
dc.creatorSOARES, E.P.
dc.creator53o. CONGRESSO ANUAL DA ASSOCIACAO BRASILEIRA DE METALURGIA E MATERIAIS - TECNOLOGIA METALURGICA E MATERIAIS
dc.date2014-11-17T17:06:59Z
dc.date2014-11-18T17:41:44Z
dc.date2015-04-02T01:06:28Z
dc.date2014-11-17T17:06:59Z
dc.date2014-11-18T17:41:44Z
dc.date2015-04-02T01:06:28Z
dc.date13-17 de setembro, 1998
dc.date.accessioned2023-09-28T13:09:24Z
dc.date.available2023-09-28T13:09:24Z
dc.identifierhttp://repositorio.ipen.br/handle/123456789/12217
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/8990024
dc.format875-885
dc.rightsopenAccess
dc.subjectsilicon
dc.subjectchlorination
dc.subjecttemperature range 0400-1000 k
dc.subjectreaction kinetics
dc.subjectoptical microscopy
dc.subjectscanning electron microscopy
dc.titleAspectos da cloracao do silicio
dc.typeTexto completo de evento
dc.coverageN


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