Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry

dc.contributorUniversidade Estadual Paulista (UNESP)
dc.creatorDe Assis Andrade Barbosa, Francisco
dc.creatorTakiy, Aline Emy
dc.creatorHiguti, Ricardo Tokio
dc.creatorCarbonari, Ronny Calixto
dc.creatorKitano, Cláudio
dc.creatorSilva, Emílio Carlos Nelli
dc.date2014-05-27T11:25:20Z
dc.date2016-10-25T18:32:54Z
dc.date2014-05-27T11:25:20Z
dc.date2016-10-25T18:32:54Z
dc.date2010-12-01
dc.date.accessioned2017-04-06T01:47:22Z
dc.date.available2017-04-06T01:47:22Z
dc.identifier2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010.
dc.identifierhttp://hdl.handle.net/11449/72051
dc.identifierhttp://acervodigital.unesp.br/handle/11449/72051
dc.identifier10.1109/INDUSCON.2010.5740065
dc.identifier2-s2.0-79955139713
dc.identifierhttp://dx.doi.org/10.1109/INDUSCON.2010.5740065
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/892958
dc.descriptionThe class of piezoelectric actuators considered in this paper consists of a multi-flexible structure actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and in different directions. The devices were modeled by finite element using the software ANSYS and the topology optimization method. The following XY actuators were build to achieve maximum displacement in the X and Y directions with a minimum crosstalk between them. The actuator prototypes are composed of an aluminum structure, manufactured by using a wire Electrical Discharge Machining, which are bonded to rectangular PZT5A piezoceramic blocks by using epoxy resin. Multi-actuator piezoelectric device displacements can be measured by using optical interferometry, since it allows dynamic measurements in the kHz range, which is of the order of the first resonance frequency of these piezomechanisms. A Michelson-type interferometer, with a He-Ne laser source, is used to measure the displacement amplitudes in nanometric range. A new optical phase demodulation technique is applied, based on the properties of the triangular waveform drive voltage applied to the XY piezoelectric nanopositioner. This is a low-phase-modulation-depth-like technique that allows the rapid interferometer auto-calibration. The measurements were performed at 100 Hz frequency, and revealed that the device is linear voltage range utilized in this work. The ratio between the generated and coupled output displacements and the drive voltages is equal to 10.97 nm/V and 1.76 nm/V, respectively, which corresponds to a 16% coupling rate. © 2010 IEEE.
dc.languageeng
dc.relation2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectAluminum structures
dc.subjectAuto calibration
dc.subjectCoupling rate
dc.subjectDisplacement amplitudes
dc.subjectDrive voltage
dc.subjectDynamic measurement
dc.subjectFinite Element
dc.subjectHe-Ne lasers
dc.subjectMaximum displacement
dc.subjectMichelson-type interferometers
dc.subjectMulti-actuated piezoelectric devices
dc.subjectNano-positioner
dc.subjectNanometric ranges
dc.subjectOptical interferometry
dc.subjectOptical phase
dc.subjectPiezoceramic
dc.subjectPiezoceramic devices
dc.subjectResonance frequencies
dc.subjectSoftware ANSYS
dc.subjectTopology Optimization Method
dc.subjectTriangular waveform
dc.subjectVoltage ranges
dc.subjectWire electrical discharge machining
dc.subjectElectric discharge machining
dc.subjectElectric discharges
dc.subjectEpoxy resins
dc.subjectFinite element method
dc.subjectFlexible structures
dc.subjectInterferometers
dc.subjectInterferometry
dc.subjectNeon
dc.subjectOptimization
dc.subjectPiezoelectricity
dc.subjectResins
dc.subjectResonance
dc.subjectPiezoelectric actuators
dc.titleCoupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry
dc.typeOtro


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