Double optical monitoring of time-dependent film formation

dc.contributorUniversidade Estadual Paulista (UNESP)
dc.creatorMichels, Alexandre F.
dc.creatorMenegotto, Thiago
dc.creatorGrieneisen, Hans Peter H.
dc.creatorSantilli, Celso Valentim
dc.creatorHorowitz, Flavio
dc.date2014-05-27T11:21:46Z
dc.date2016-10-25T18:21:46Z
dc.date2014-05-27T11:21:46Z
dc.date2016-10-25T18:21:46Z
dc.date2005-12-23
dc.date.accessioned2017-04-06T01:17:08Z
dc.date.available2017-04-06T01:17:08Z
dc.identifierProceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.
dc.identifier0277-786X
dc.identifierhttp://hdl.handle.net/11449/68697
dc.identifierhttp://acervodigital.unesp.br/handle/11449/68697
dc.identifier10.1117/12.617967
dc.identifier2-s2.0-29144506747
dc.identifierhttp://dx.doi.org/10.1117/12.617967
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/890019
dc.descriptionA brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
dc.languageeng
dc.relationProceedings of SPIE - The International Society for Optical Engineering
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectOptical properties
dc.subjectQuality control
dc.subjectReflection
dc.subjectRefractive index
dc.subjectOptical monitoring
dc.subjectPhysical thickness
dc.subjectPolarimetric measurements
dc.subjectThin films
dc.titleDouble optical monitoring of time-dependent film formation
dc.typeOtro


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