Otro
Effect of thermal treatment on the morphology of PLZT thin films prepared from polymeric precursor method
Registro en:
Key Engineering Materials, v. 189-191, p. 155-160, 2001.
1013-9826
10.4028/www.scientific.net/KEM.189-191.155
2-s2.0-0035148113
Autor
González, A. H. M.
Simões, A. Z.
Varela, José Arana
Zaghete, M. A.
Longo, Elson
Resumen
Lead lanthanum zirconate titanate (PLZT) thin films with (9/65/35) stoichiometry were prepared by dip coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 450° to 700°C for 6 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that PLZT phase crystallizes at low temperature (500°C) and present preferential orientation. It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 650°C. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by the annealing temperature.