dc.contributorUniversidade Estadual Paulista (UNESP)
dc.creatorBrankovic, Z.
dc.creatorBrankovic, G.
dc.creatorTucic, A.
dc.creatorRadojkovic, A.
dc.creatorLongo, Elson
dc.creatorVarela, José Arana
dc.date2014-05-20T15:34:31Z
dc.date2016-10-25T18:10:58Z
dc.date2014-05-20T15:34:31Z
dc.date2016-10-25T18:10:58Z
dc.date2009-09-01
dc.date.accessioned2017-04-06T00:36:43Z
dc.date.available2017-04-06T00:36:43Z
dc.identifierScience of Sintering. Belgrade: Int Inst Science Sintering (i I S S), v. 41, n. 3, p. 303-308, 2009.
dc.identifier0350-820X
dc.identifierhttp://hdl.handle.net/11449/42562
dc.identifierhttp://acervodigital.unesp.br/handle/11449/42562
dc.identifier10.2298/SOS0903303B
dc.identifierWOS:000275835500008
dc.identifierWOS000275835500008.pdf
dc.identifierhttp://dx.doi.org/10.2298/SOS0903303B
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/885210
dc.descriptionIn this work we optimized conditions for aerosol deposition of homogeneous, nano-grained, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85 degrees C. After deposition films were slowly heated up to 650 degrees C, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crack-free, and smooth with rms roughness lower than 4 nm for both substrates.
dc.languageeng
dc.publisherInt Inst Science Sintering (i I S S)
dc.relationScience of Sintering
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectThin films
dc.subjectAerosol deposition
dc.subjectBarium Strontium Titanate
dc.subjectRoughness
dc.titleAerosol Deposition of Ba0.8Sr0.2TiO3 Thin Films
dc.typeOtro


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