dc.creator | Miguel Dominguez | |
dc.creator | Pedro Rosales Quintero | |
dc.creator | ALFONSO TORRES JACOME | |
dc.date | 2012 | |
dc.date.accessioned | 2023-07-25T16:24:58Z | |
dc.date.available | 2023-07-25T16:24:58Z | |
dc.identifier | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/2104 | |
dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/7807285 | |
dc.description | This paper presents the study of an interface preparation procedure in the source/drain regions of the active layer, prior to deposit the n+ a-Ge:H contact layer in the fabrication process of low-temperature a-SiGe:H thin-film transistors. The devices were fabricated on corning 1737 substrates at 200 °C. The improvement in metal–semiconductor interface by the interface preparation procedure was demonstrated. This interface improvement translates in higher mobility and better values of off-current, on/off-current ratio, subthreshold slope and threshold voltage. | |
dc.format | application/pdf | |
dc.language | eng | |
dc.publisher | Solid-State Electronics | |
dc.relation | citation:Dominguez, Miguel, et al., (2012), Performance improvement of low-temperature a-SiGe:H thin-film transistors, Solid-State Electronics, Vol. 76:44–47 | |
dc.rights | info:eu-repo/semantics/openAccess | |
dc.rights | http://creativecommons.org/licenses/by-nc-nd/4.0 | |
dc.subject | info:eu-repo/classification/Inspec/Thin-film transistor | |
dc.subject | info:eu-repo/classification/Inspec/Hydrogenated amorphous silicon–germanium | |
dc.subject | info:eu-repo/classification/Inspec/Hydrogen plasma | |
dc.subject | info:eu-repo/classification/Inspec/Low-temperature | |
dc.subject | info:eu-repo/classification/cti/1 | |
dc.subject | info:eu-repo/classification/cti/22 | |
dc.subject | info:eu-repo/classification/cti/2203 | |
dc.subject | info:eu-repo/classification/cti/2203 | |
dc.title | Performance improvement of low-temperature a-SiGe:H thin-film transistors | |
dc.type | info:eu-repo/semantics/article | |
dc.type | info:eu-repo/semantics/acceptedVersion | |
dc.audience | students | |
dc.audience | researchers | |
dc.audience | generalPublic | |