Study of polymorphous silicon as thermo-sensing film for infrared detectors

dc.creatorMARIO MORENO MORENO
dc.creatorALFONSO TORRES JACOME
dc.creatorPedro Rosales Quintero
dc.creatorCARLOS ZUÑIGA ISLAS
dc.creatorCLAUDIA REYES BETANZO
dc.creatorWilfrido Calleja Arriaga
dc.creatorFRANCISCO JAVIER DE LA HIDALGA WADE
dc.date2012
dc.date.accessioned2023-07-25T16:24:57Z
dc.date.available2023-07-25T16:24:57Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/2102
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7807283
dc.descriptionIn this work we have deposited and characterized pm-Si:H thin films obtained by plasma deposition. Our aim is to use pm-Si:H as thermo-sensing element for infrared (IR) detectors based on un-cooled microbolometers. We have studied the electrical characteristics of pm-Si:H that are figures of merit important for IR detection, as activation energy, thermal coefficient of resistance (TCR), room temperature conductivity (σRT) and responsivity under IR radiation. The influence of the substrate temperature (200 °C and 300 °C) on the pm-Si:H characteristics has been also studied. Our results shown that pm-Si:H is an excellent candidate to be used as thermo-sensing film for microbolometers, due to its large activation energy and TCR, with an improved σRT.
dc.formatapplication/pdf
dc.languageeng
dc.publisherMaterials Science and Engineering B
dc.relationcitation:Moreno, M., et al., (2012), Study of polymorphous silicon as thermo-sensing film for infrared detectors, Materials Science and Engineering B, Vol. 177(10):756–761
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Inspec/Polymorphous silicon
dc.subjectinfo:eu-repo/classification/Inspec/Amorphous silicon
dc.subjectinfo:eu-repo/classification/Inspec/Microbolometers
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleStudy of polymorphous silicon as thermo-sensing film for infrared detectors
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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