Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures

dc.creatorAbdu Orduña Díaz
dc.creatorEdgar Castillo Domínguez
dc.creatorALFONSO TORRES JACOME
dc.creatorFRANCISCO JAVIER DE LA HIDALGA WADE
dc.creatorCARLOS GERARDO TREVIÑO PALACIOS
dc.date2011
dc.date.accessioned2023-07-25T16:24:12Z
dc.date.available2023-07-25T16:24:12Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1718
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806910
dc.descriptionWe present the design, micromachining and characterization of a bidimentional bolometer array for radiation detection in the 0.7-1.5 THz frequency range. The detector is based on a boron doped amorphous silicon film (a-Si-B:H). The film optimized for sensitivity enhancement was obtained using 500 sccm diborane flow with 95 nm thickness. The sensing layer was deposited using plasma enhanced chemical vapor deposition (PECVD) technique at low frequency on a 0.45 μm thick silicon nitride membrane sustained by a micromachined frame in crystalline silicon. The design consists of four 5x5 bolometer arrays made by conventional lithography. The bolometer active area is 660 μm x 420 μm and the detector will operate as a focal plane array. The current–voltage characteristics present an ohmic behaviour; the temperature coefficient of resistance (TCR) was obtained by measuring the bolometer performance from room temperature down to liquid nitrogen temperature. The responsivity was measured under illumination from a black body radiating at 300, 500, 700, 900 and 1100 °C, obtaining a value of R =1.17 x 10−2 A/W with a dark current of 4.43 x 10−9 A
dc.formatapplication/pdf
dc.languageeng
dc.publisherIOP Publishing
dc.relationcitation:Orduña-Díaz, A., et al., (2011). Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures, XVII Reunión Iberoamericana de Óptica & X Encuentro de Óptica, Láseres y Aplicaciones, Journal of Physics: Conference Series, (274):1-5
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Microbolometer/Microbolometer
dc.subjectinfo:eu-repo/classification/Amorphous silicon/Amorphous silicon
dc.subjectinfo:eu-repo/classification/Micromachining/Micromachining
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleDesign and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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