| dc.creator | JULIO CESAR RAMIREZ SAN JUAN | |
| dc.creator | JUAN PABLO PADILLA MARTINEZ | |
| dc.creator | Plácido Zaca Morán | |
| dc.creator | RUBEN RAMOS GARCIA | |
| dc.date | 2011-08-01 | |
| dc.date.accessioned | 2023-07-25T16:24:05Z | |
| dc.date.available | 2023-07-25T16:24:05Z | |
| dc.identifier | http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1653 | |
| dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/7806848 | |
| dc.description | In this work, we perform drilling of micro-holes and micro-patterning in indium tin oxide (ITO) and titanium thin films. In ITO films the drilling is performed by thermocavitation only; meanwhile in titanium two competing processes are identified: (i) laser-induced sublimation producing high-quality micro-holes comparable to those produced with femtosecond pulses but at a reduced cost and (ii) erosion by thermocavitation which tend to degrade the quality of the micro-holes. The micro-holes can be employed as micrometer light sources for use in point-diffraction interferometers or spatial filters; in addition, micron-sized resolution patterning can be performed. | |
| dc.format | application/pdf | |
| dc.language | eng | |
| dc.publisher | Optical Materials Express | |
| dc.relation | citation:Ramirez San Juan, J. C., et al., (2011), Micro-hole drilling in thin films with cw low power lasers, Optical Materials Express. Vol. 1(4):598-604 | |
| dc.rights | info:eu-repo/semantics/openAccess | |
| dc.rights | http://creativecommons.org/licenses/by-nc-nd/4.0 | |
| dc.subject | info:eu-repo/classification/Inspec/Laser materials processing | |
| dc.subject | info:eu-repo/classification/Inspec/Thermal effects | |
| dc.subject | info:eu-repo/classification/Inspec/Damage | |
| dc.subject | info:eu-repo/classification/Inspec/Microstructure fabrication | |
| dc.subject | info:eu-repo/classification/Inspec/Micro-optical devices | |
| dc.subject | info:eu-repo/classification/cti/1 | |
| dc.subject | info:eu-repo/classification/cti/22 | |
| dc.subject | info:eu-repo/classification/cti/2209 | |
| dc.subject | info:eu-repo/classification/cti/2209 | |
| dc.title | Micro-hole drilling in thin films with cw low power lasers | |
| dc.type | info:eu-repo/semantics/article | |
| dc.type | info:eu-repo/semantics/acceptedVersion | |
| dc.audience | students | |
| dc.audience | researchers | |
| dc.audience | generalPublic | |
