A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector

dc.creatorMARIANO ACEVES MIJARES
dc.creatorALFREDO MORALES SANCHEZ
dc.date2009
dc.date.accessioned2023-07-25T16:23:14Z
dc.date.available2023-07-25T16:23:14Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1226
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806423
dc.descriptionA photodetector that shows high photocurrent in the ultraviolet and visible wavelengths has been fabricated. The device consists of a metal-oxide-semiconductor (MOS)-like grid structure where the dielectric layer is a silicon-rich oxide (SRO) film. Its fabrication is completely compatible with silicon technology. SRO thin films with 1 to 12% silicon excess were deposited on silicon wafers by low pressure chemical vapour deposition technique. After thermal annealing, silicon nanoagglomerates were created. Current-voltage measurements in dark and under illumination conditions were done to test the devices.
dc.formatapplication/pdf
dc.languageeng
dc.publisherElsevier B.V.
dc.relationcitation:Luna-López, J.A., et al., (2009). A simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector, Procedia Chemistry (1): 1171–1174
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Photodetector/Photodetector
dc.subjectinfo:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
dc.subjectinfo:eu-repo/classification/Photocurrent/Photocurrent
dc.subjectinfo:eu-repo/classification/Silicon nanoparticles/Silicon nanoparticles
dc.subjectinfo:eu-repo/classification/Electrical properties/Electrical properties
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleA simple Al/SRO/Si structure with silicon nanoparticles as a UV and Vis photodetector
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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