Fabrication and characterization of coplanar waveguides on silicon using a combination of SiO2 and SRO20

dc.creatorREBECA LEAL ROMERO
dc.creatorIGNACIO ENRIQUE ZALDIVAR HUERTA
dc.creatorMARIA DEL CARMEN MAYA SANCHEZ
dc.creatorMARIANO ACEVES MIJARES
dc.creatorJ. APOLINAR REYNOSO HERNANDEZ
dc.date2008
dc.date.accessioned2023-07-25T16:23:00Z
dc.date.available2023-07-25T16:23:00Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1111
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806310
dc.descriptionIn this work, the use of silicon rich oxide (SRO) and chemical vapor deposition SiO2 double layers as passivation films of coplanar waveguides (CPW) on high resistivity silicon (HR-Si) with an N+ backside is studied. The microwave performance of the fabricated CPWs is evaluated by computing the attenuation loss of the devices in the 0.045–50 GHz frequency range. Experimental results show that the N+ layer can be used without affecting CPW performance. Also, using a combined dielectric layer (SRO20/SiO2), the attenuation losses are reduced compared to single dielectric layers.
dc.formatapplication/pdf
dc.languageeng
dc.publisherIEEE
dc.relationcitation:Leal-Romero, R., et al., (2008). Fabrication and characterization of coplanar waveguides on silicon using a combination of SiO2 and SRO20, IEEE Transactions on components and packaging technologies, Vol. 31 (3): 678-682
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Attenuation constant/Attenuation constant
dc.subjectinfo:eu-repo/classification/Coplanar waveguide (CPW)/Coplanar waveguide (CPW)
dc.subjectinfo:eu-repo/classification/Dielectric constant/Dielectric constant
dc.subjectinfo:eu-repo/classification/Silicon rich oxide (SRO)/Silicon rich oxide (SRO)
dc.subjectinfo:eu-repo/classification/Traveling wave/Traveling wave
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleFabrication and characterization of coplanar waveguides on silicon using a combination of SiO2 and SRO20
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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