Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films

dc.creatorJOSE ALBERTO LUNA LOPEZ
dc.creatorALFREDO MORALES SANCHEZ
dc.creatorMARIANO ACEVES MIJARES
dc.date2008
dc.date.accessioned2023-07-25T16:22:53Z
dc.date.available2023-07-25T16:22:53Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1055
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806254
dc.descriptionIt is well known that silicon-rich oxide (SRO) shows intense photoluminescence (PL). In this work, the authors studied the relationship of the surface morphology and the PL emission. PL spectra of SRO as a function of the excess silicon, temperature, and time of thermal annealing were obtained. The same samples were studied using transmission electronic microscopy and atomic force microscopy to determine their microstructure and surface morphology. A relationship between silicon agglomerates in the SRO and the surface morphology was obtained. Then, the red PL emission was related to the surface morphology. The authors found that the surface roughness is an important parameter for the high red emission of SRO.
dc.formatapplication/pdf
dc.languageeng
dc.publisherAmerican Vacuum Society
dc.relationcitation:Luna-López, J.A., et al., (2008). Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films, J. Vac. Sci. Technol. A, Vol. 27 (1): 57-62
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleAnalysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/publishedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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