Comparative study between silicon-rich oxide films obtained by LPCVD and PECVD

dc.creatorMARIANO ACEVES MIJARES
dc.date2007
dc.date.accessioned2023-07-25T16:22:45Z
dc.date.available2023-07-25T16:22:45Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/971
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806170
dc.descriptionA comparative study of compositional and optical properties of silicon-rich oxide (SRO) films deposited by low-pressure chemical vapor deposition (LPCVD) and plasma-enhanced chemical vapor deposition (PECVD) is presented. Infrared spectra revealed the presence of hydrogen bonded to silicon atoms in the SRO–PECVD films, whereas in SRO–LPCVD films the IR spectra looked like the stoichiometric thermal silicon oxide. Moreover, X-ray photoelectron spectroscopy (XPS) studies showed that the SRO–PECVD films contain a higher content of nitrogen than SRO–LPCVD films. In spite of differences, the SRO films obtained by both methods show a strong room-temperature photoluminescence (PL). However, the highest PL intensity was emitted by SRO films obtained by LPCVD.
dc.formatapplication/pdf
dc.languageeng
dc.publisherElsevier B.V.
dc.publisherScience Direct
dc.relationcitation:Morales, A., et al., (2007). Comparative study between silicon-rich oxide films obtained by LPCVD and PECVD, Physica E (38): 54–58
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Silicon rich oxide/Silicon rich oxide
dc.subjectinfo:eu-repo/classification/Infrared spectroscopy/Infrared spectroscopy
dc.subjectinfo:eu-repo/classification/XPS/XPS
dc.subjectinfo:eu-repo/classification/Photoluminescence/Photoluminescence
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleComparative study between silicon-rich oxide films obtained by LPCVD and PECVD
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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