Fabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer

dc.creatorMARIO MORENO MORENO
dc.creatorANDREY KOSAREV
dc.creatorALFONSO TORRES JACOME
dc.creatorROBERO CARLOS AMBROSIO LAZARO
dc.date2007-01
dc.date.accessioned2023-07-25T16:22:36Z
dc.date.available2023-07-25T16:22:36Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/899
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806099
dc.descriptionTwo types of micro-bolometer structures were fabricated with the same materials and fabrication process. The structures are labeled planar and sandwich types. Their performance was measured and a comparison was performed among these structures. Our results show that the sandwich type structure behaves better in terms of the voltage and current responsivity, but shows 2 to 3 orders of magnitude higher 1/f noise levels. In spite that the sandwich configuration shows a lower response time constant than that of the planar device, the noise level makes the detectivity of both devices practically the same.
dc.formatapplication/pdf
dc.languageeng
dc.publisherElsevier
dc.publisherScience Direct
dc.relationcitation:M. Moreno
dc.relationcitation:A. Kosarev
dc.relationcitation:A. Torres
dc.relationcitation:R. Ambrosio
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Amorphous materials/Amorphous materials
dc.subjectinfo:eu-repo/classification/Germanium/Germanium
dc.subjectinfo:eu-repo/classification/Silicon/Silicon
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleFabrication and performance comparison of planar and sandwich structures of micro-bolometers with Ge thermo-sensing layer
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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