| dc.creator | Jorge Alberto Luna López | |
| dc.creator | Alfredo Morales Sánchez | |
| dc.creator | MARIANO ACEVES MIJARES | |
| dc.creator | JESUS CARRILLO LOPEZ | |
| dc.date | 2009-09 | |
| dc.date.accessioned | 2023-07-21T15:32:30Z | |
| dc.date.available | 2023-07-21T15:32:30Z | |
| dc.identifier | http://cimav.repositorioinstitucional.mx/jspui/handle/1004/2583 | |
| dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/7728529 | |
| dc.description | Silicon rich oxide (SRO) is a dielectric material
that contains silicon nanoparticles (Si-nps). The
composition, structure, and emission of the SRO
films deposited by low pressure chemical vapor
deposition (LPCVD) were studied; Different
microscopic and spectroscopic techniques, such as
Atomic Force Microscopy (AFM), High Resolution
Transmission Electronic Microscopy and Energy
Filtered-TEM (HRTEM and EFTEM),
Rutherford Backscattering Spectroscopy (RBS),
X-Ray Photoelectrons Spectroscopy (XPS) and
Photoluminescence (PL) were used to characterize
the SRO films. Results show that SRO films are
formed by SiO2, Si-nps, and compounds. The
composition, structure (morphology and Si-nps)
and luminescence of the SRO films varied with the
silicon excess. | |
| dc.format | application/pdf | |
| dc.language | eng | |
| dc.rights | info:eu-repo/semantics/openAccess | |
| dc.rights | http://creativecommons.org/licenses/by-nc/4.0 | |
| dc.subject | info:eu-repo/classification/cti/1 | |
| dc.subject | info:eu-repo/classification/cti/22 | |
| dc.subject | info:eu-repo/classification/cti/2210 | |
| dc.subject | info:eu-repo/classification/cti/221020 | |
| dc.subject | info:eu-repo/classification/cti/221020 | |
| dc.title | MICROSCOPY, SPECTROSCOPY AND PHOTOLUMINESCENCE OF OXIDE FILMS WITH SILICON NANOPARTICLES | |
| dc.type | info:eu-repo/semantics/conferenceProceedings | |
| dc.type | info:eu-repo/semantics/acceptedVersion | |
