| dc.creator | MARIANO ACEVES MIJARES | |
| dc.creator | Emmanuel Gómez Ramírez | |
| dc.creator | JOSE MIGUEL ROCHA PEREZ | |
| dc.creator | Jesús Alarcón Salazar | |
| dc.creator | SERGIO ROMAN LOPEZ | |
| dc.creator | Alfredo Morales Sánchez | |
| dc.date | 2014 | |
| dc.date.accessioned | 2023-07-21T15:32:08Z | |
| dc.date.available | 2023-07-21T15:32:08Z | |
| dc.identifier | http://cimav.repositorioinstitucional.mx/jspui/handle/1004/2425 | |
| dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/7728320 | |
| dc.description | Abstract
The Silicon rich silicon oxide (SRO) is a CMOS compatible material that present light emission properties when
annealed at high temperatures to produce the silicon segregation process. This material can be used to integrate
optoelectronics circuits. However, during the CMOS fabrication process there are thermal processes that could alter
the characteristics of this material. Moreover, in the same way thermal treatments needed for efficient light emission
in the SRO could damage the electronic circuits. Then, special care has to be paid when SRO devices with optical
functions and CMOS with electronic control circuits are integrated. In this paper, it is shown how a silicon sensor
cover with a SRO layer and various electronic CMOS circuits were fabricated simultaneously. Details of how the
SRO film was protected to avoid it to be damage, and how the SRO film was deposited and annealed in order to
maintain the electronic circuitry working, are given. Experimental details of the optical properties and the electronic
functionality are displayed. So, it is possible to integrate the SRO film and electronic functions in silicon IC
successfully.
© 2014 The Authors. Published by Elsevier Ltd.
Selection and peer-review under responsibility of ISEL – Instituto Superior de Engenharia de Lisboa.
Keywords: Silicon Rich Oxide; Optical properties; CMOS Optoelectronics integrated circuits.
Ltd. This is an open access article under the CC BY-NC-ND license
(http://creativecommons.org/licenses/by-nc-nd/3.0/).
Peer-review under responsibility of ISEL – Instituto Superior de Engenharia de Lisboa, Lisbon, PORTUGAL | |
| dc.format | application/pdf | |
| dc.language | eng | |
| dc.rights | info:eu-repo/semantics/openAccess | |
| dc.rights | http://creativecommons.org/licenses/by-nc/4.0 | |
| dc.subject | info:eu-repo/classification/cti/2 | |
| dc.subject | info:eu-repo/classification/cti/2 | |
| dc.title | Conservation of the optical properties of SRO after CMOS IC processing | |
| dc.type | info:eu-repo/semantics/article | |
| dc.type | info:eu-repo/semantics/publishedVersion | |
