SURFACE MEASUREMENT WITH VERTICAL SUPER-RESOLUTION OF ALUMINUM THIN FILMS BY USING PHASE-SHIFTING INTERFEROMETRY

dc.contributorManuel Servín Guirado
dc.creatorIvan Choque
dc.date2021-05
dc.date.accessioned2023-07-21T15:15:52Z
dc.date.available2023-07-21T15:15:52Z
dc.identifierhttp://cio.repositorioinstitucional.mx/jspui/handle/1002/1213
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7725967
dc.description"In this dissertation, we present a procedure to measure the phase from non-uniform phase-shifting interferograms in order to estimate the surface topography of an aluminum thin film. Interferograms are acquired from a Michelson interferential microscope, and phase shifts among interferograms are non-uniform because a piezoelectric transducer (PZT), working in open-loop mode, is used as phase shifter. Non-uniform phase shifts generate two types of errors in phase measurements: the double-frequency ripple distortion and the spurious piston. Thus, in order to overcome the aforementioned errors, we design error-correcting and non-iterative phase shifting algorithms (PSAs)."
dc.formatapplication/pdf
dc.languageeng
dc.relationcitation:Choque Aquino, (2021). "Surface measurement with vertical super-resolution of aluminum thin films by using phase-shifting interferometry". Tesis de Doctorado en Ciencias (Óptica). Centro de Investigaciones en Óptica, A.C. León, Guanajuato. 65 pp.
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Autor/Surface topography
dc.subjectinfo:eu-repo/classification/Autor/Non-uniform phase shift
dc.subjectinfo:eu-repo/classification/Autor/Phase shifting algorithm
dc.subjectinfo:eu-repo/classification/Autor/Double-frequency ripple distortion
dc.subjectinfo:eu-repo/classification/Autor/Spurious piston
dc.subjectinfo:eu-repo/classification/Autor/Interferogram
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2209
dc.subjectinfo:eu-repo/classification/cti/220990
dc.subjectinfo:eu-repo/classification/cti/220990
dc.titleSURFACE MEASUREMENT WITH VERTICAL SUPER-RESOLUTION OF ALUMINUM THIN FILMS BY USING PHASE-SHIFTING INTERFEROMETRY
dc.typeinfo:eu-repo/semantics/doctoralThesis
dc.typeinfo:eu-repo/semantics/publishedVersion
dc.coverageLeón, Guanajuato
dc.audiencegeneralPublic


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