Foundry Polymer-Based Inverted-Rib Waveguides

dc.contributorCentro de Tecnologia da Informação (CTI) Renato Archer
dc.contributorUniversidade Estadual Paulista (Unesp)
dc.contributorCEITEC S.A Semiconductors
dc.date.accessioned2019-10-06T15:34:45Z
dc.date.accessioned2022-12-19T18:30:26Z
dc.date.available2019-10-06T15:34:45Z
dc.date.available2022-12-19T18:30:26Z
dc.date.created2019-10-06T15:34:45Z
dc.date.issued2019-01-11
dc.identifier2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018.
dc.identifierhttp://hdl.handle.net/11449/187392
dc.identifier10.1109/SBFoton-IOPC.2018.8610902
dc.identifier2-s2.0-85061980925
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/5368430
dc.description.abstractDevelopment of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.
dc.languageeng
dc.relation2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018
dc.rightsAcesso restrito
dc.sourceScopus
dc.subjectoptical device fabrication
dc.subjectoptical polymers
dc.subjectoptical resonators
dc.titleFoundry Polymer-Based Inverted-Rib Waveguides
dc.typeActas de congresos


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