| dc.creator | Suarez, Maria Patricia | |
| dc.creator | Mirabella, D. A. | |
| dc.creator | Aldao, Celso Manuel | |
| dc.date.accessioned | 2019-01-14T14:23:45Z | |
| dc.date.accessioned | 2022-10-15T09:31:36Z | |
| dc.date.available | 2019-01-14T14:23:45Z | |
| dc.date.available | 2022-10-15T09:31:36Z | |
| dc.date.created | 2019-01-14T14:23:45Z | |
| dc.date.issued | 2008-02-19 | |
| dc.identifier | Suarez, Maria Patricia; Mirabella, D. A.; Aldao, Celso Manuel; Dynamics of hillocks formation during wet etching; Elsevier Science; Journal of Molecular Catalysis A: Chemical; 281; 1-2; 19-2-2008; 230-236 | |
| dc.identifier | 1381-1169 | |
| dc.identifier | http://hdl.handle.net/11336/67970 | |
| dc.identifier | CONICET Digital | |
| dc.identifier | CONICET | |
| dc.identifier.uri | https://repositorioslatinoamericanos.uchile.cl/handle/2250/4370665 | |
| dc.description.abstract | Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method. Simulations were used to explore the consequences of site-dependent detachment probabilities on surface morphology for a one- and two-dimensional substrate models. Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(1 0 0) are presented. The steady-state morphologies are analyzed and the hillock size distributions determined. The mechanisms responsible for the steady-state morphologies are described. | |
| dc.language | eng | |
| dc.publisher | Elsevier Science | |
| dc.relation | info:eu-repo/semantics/altIdentifier/url/https://www.sciencedirect.com/science/article/pii/S1381116907004918?via%3Dihub | |
| dc.relation | info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1016/j.molcata.2007.08.012 | |
| dc.rights | https://creativecommons.org/licenses/by-nc-nd/2.5/ar/ | |
| dc.rights | info:eu-repo/semantics/restrictedAccess | |
| dc.subject | ETCHING | |
| dc.subject | MONTE CARLO SIMULATIONS | |
| dc.subject | ROUGHNESS AND TOPOGRAPHY | |
| dc.subject | SCANNING ELECTRON MICROSCOPY | |
| dc.title | Dynamics of hillocks formation during wet etching | |
| dc.type | info:eu-repo/semantics/article | |
| dc.type | info:ar-repo/semantics/artículo | |
| dc.type | info:eu-repo/semantics/publishedVersion | |
