A Mini-FAB simulation model comparing FIFO and MIVP(R) schedule policies (outer loop), and PID and H machine controllers (inner loop) for semiconductor diffusion bay maintenance

dc.creatorJOSE JOB FLORES GODOY
dc.date1998
dc.date.accessioned2022-10-12T20:18:45Z
dc.date.available2022-10-12T20:18:45Z
dc.identifierhttp://ri.ibero.mx/handle/ibero/1743
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/4131072
dc.formatapplication/pdf
dc.languageeng
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.sourceIECON '98. Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society
dc.subjectinfo:eu-repo/classification/cti/1
dc.titleA Mini-FAB simulation model comparing FIFO and MIVP(R) schedule policies (outer loop), and PID and H machine controllers (inner loop) for semiconductor diffusion bay maintenance
dc.typeinfo:eu-repo/semantics/conferencePaper


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