dc.creatorGABRIELA MOLAR VELAZQUEZ
dc.creatorFRANCISCO JAVIER RENERO CARRILLO
dc.creatorWILFRIDO CALLEJA ARRIAGA
dc.date2010
dc.date.accessioned2022-10-12T20:14:54Z
dc.date.available2022-10-12T20:14:54Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1445
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/4130596
dc.descriptionA two-dimensional optical micro-scanner, which main components are two mobile flat and a concave micro-mirrors, is designed such that, all optical components can be fabricated on the same substratum. The optical parameters, which physical dimensions are between 50 and 500 μm, are obtained within the geometrical optics. The optical performance is evaluated by means of the MTF and Rayleigh resolution criteria, given 80% of modulation for a frequency of 8 cycles/mm with a Gaussian source, the resolution limit is 30 μm.
dc.formatapplication/pdf
dc.languageeng
dc.publisherElsevier Gm bH
dc.relationcitation:Molar-Velázquez, G., et al., (2010). Two-dimensional optical micro-scanner on silicon technology, Optik (121): 843–846
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Optical design/Optical design
dc.subjectinfo:eu-repo/classification/Micro-mirrors/Micro-mirrors
dc.subjectinfo:eu-repo/classification/Micro-optical systems/Micro-optical systems
dc.subjectinfo:eu-repo/classification/Integrated optics/Integrated optics
dc.subjectinfo:eu-repo/classification/Oslo/Oslo
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleTwo-dimensional optical micro-scanner on silicon technology
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/publishedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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