AFM and XPS characterization of TiN thin films grown on nanoporous Al2O3 by using the DC sputtering technique assisted by balanced magnetron

dc.creatorCÉSAR OCTAVIO ENCINAS BACA
dc.creatorIGNACIO YOCUPICIO VILLEGAS
dc.date2007
dc.date.accessioned2022-10-12T19:39:10Z
dc.date.available2022-10-12T19:39:10Z
dc.identifierhttp://cimav.repositorioinstitucional.mx/jspui/handle/1004/1383
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/4119405
dc.descriptionThin coatings continually are in progress and also them applications. Simple thin films present better results with other metal doping in shape of multi-shells y nano-shells, sequential shell and combinations of shells with different characteristics.
dc.formatapplication/pdf
dc.languageeng
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/about/cc0/
dc.subjectinfo:eu-repo/classification/XPS/AFM
dc.subjectinfo:eu-repo/classification/cti/2
dc.subjectinfo:eu-repo/classification/cti/23
dc.subjectinfo:eu-repo/classification/cti/2307
dc.subjectinfo:eu-repo/classification/cti/221099
dc.titleAFM and XPS characterization of TiN thin films grown on nanoporous Al2O3 by using the DC sputtering technique assisted by balanced magnetron
dc.typeinfo:eu-repo/semantics/conferenceProceedings
dc.typeinfo:eu-repo/semantics/submittedVersion


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