masterThesis
Influência dos parâmetros de processo na deposição de nitreto de titânio por plasma em gaiola catódica
Fecha
2012-02-27Registro en:
DAUDT, Natalia de Freitas. Influência dos parâmetros de processo na deposição de nitreto de titânio por plasma em gaiola catódica. 2012. 142 f. Dissertação (Mestrado em Processamento de Materiais a partir do Pó; Polímeros e Compósitos; Processamento de Materiais a part) - Universidade Federal do Rio Grande do Norte, Natal, 2012.
Autor
Daudt, Natalia de Freitas
Resumen
Titanium nitride films were grown on glass using the Cathodic Cage Plasma Deposition
technique in order to verify the influence of process parameters in optical and structural
properties of the films. The plasma atmosphere used was a mixture of Ar, N2 and H2,
setting the Ar and N2 gas flows at 4 and 3 sccm, respectively and H2 gas flow varied
from 0, 1 to 2 sccm. The deposition process was monitored by Optical Emission
Spectroscopy (OES) to investigate the influence of the active species in plasma. It was
observed that increasing the H2 gas flow into the plasma the luminescent intensities
associated to the species changed. In this case, the luminescence of N2 (391,4nm)
species was not proportional to the increasing of the H2 gas into the reactor. Other
parameters investigated were diameter and number of holes in the cage. The analysis
by Grazing Incidence X-Ray Diffraction (GIXRD) confirmed that the obtained films are
composed by TiN and they may have variations in the nitrogen amount into the crystal
and in the crystallite size. The optical microscopy images provided information about the
homogeneity of the films. The atomic force microscopy (AFM) results revealed some
microstructural characteristics and surface roughness. The thickness was measured by
ellipsometry. The optical properties such as transmittance and reflectance (they were
measured by spectrophotometry) are very sensitive to changes in the crystal lattice of
the material, chemical composition and film thicknesses. Therefore, such properties are
appropriate tools for verification of this process control. In general, films obtained at 0
sccm of H2 gas flow present a higher transmittance. It can be attributed to the smaller
crystalline size due to a higher amount of nitrogen in the TiN lattice. The films obtained
at 1 and 2 sccm of H2 gas flow have a golden appearance and XRD pattern showed
peaks characteristics of TiN with higher intensity and smaller FWHM (Full Width at Half
Maximum) parameter. It suggests that the hydrogen presence in the plasma makes the
films more stoichiometric and becomes it more crystalline. It was observed that with
higher number of holes in the lid of the cage, close to the region between the lid and the
sample and the smaller diameter of the hole, the deposited film is thicker, which is
justified by the most probability of plasma species reach effectively the sample and it
promotes the growth of the film