Submicron fabrication by local anodic oxidation of germanium thin films

dc.creatorOliveira, Alexandre Barbosa de
dc.creatorRibeiro, Gilberto Medeiros
dc.creatorCosta, Antonio Azevedo da
dc.date.accessioned2017-11-29T19:23:29Z
dc.date.accessioned2022-10-05T23:06:20Z
dc.date.available2017-11-29T19:23:29Z
dc.date.available2022-10-05T23:06:20Z
dc.date.created2017-11-29T19:23:29Z
dc.date.issued2009-08-04
dc.identifierOLIVEIRA, Alexandre Barbosa de; RIBEIRO, Gilberto Medeiros; COSTA, Antonio Azevedo da. Submicron fabrication by local anodic oxidation of germanium thin films. Nanotechnology (Bistrol), v. 20, jan. 2009. ISSN 1361-6528. Disponível em: <http://iopscience.iop.org/article/10.1088/0957-4484/20/34/345301/meta;jsessionid=D69265138A69A002654908D2A11D0FC1.c3.iopscience.cld.iop.org>. Acesso em: 04 out. 2017.
dc.identifier1361-6528
dc.identifierhttps://repositorio.ufrn.br/jspui/handle/123456789/24383
dc.identifier10.1088/0957-4484/20/34/345301
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/3946930
dc.publisherIOP PUBLISHING
dc.rightsAcesso Aberto
dc.subjectSubmicrons
dc.subjectAnodic Oxidation
dc.subjectGermanium
dc.titleSubmicron fabrication by local anodic oxidation of germanium thin films
dc.typearticle


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