Critical parameter determination of sonic flow controller diamond microtubes and micronozzles

dc.contributorUniversidade de São Paulo (USP)
dc.contributorUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:22:45Z
dc.date.accessioned2022-10-05T18:10:52Z
dc.date.available2014-05-27T11:22:45Z
dc.date.available2022-10-05T18:10:52Z
dc.date.created2014-05-27T11:22:45Z
dc.date.issued2007-12-19
dc.identifierJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v. 25, n. 6, p. 1804-1807, 2007.
dc.identifier1071-1023
dc.identifierhttp://hdl.handle.net/11449/70217
dc.identifier10.1116/1.2790924
dc.identifier2-s2.0-37149002798
dc.identifier2-s2.0-37149002798.pdf
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/3919557
dc.description.abstractIn this article, the authors measure throughput of sonic diamond microtubes and micronozzles that can work as passive gas flow controllers and flow meters under choking conditions. The behavior of the outlet pressure through the microdevices using an experimental setup with constant volume and constant temperature was determined in order to obtain the critical throughput, the critical mass flow rate, and the discharge coefficients of the diamond sonic microdevices. © 2007 American Vacuum Society.
dc.languageeng
dc.relationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
dc.relation1.314
dc.rightsAcesso restrito
dc.sourceScopus
dc.subjectDiamonds
dc.subjectFlow rate
dc.subjectFlowmeters
dc.subjectThroughput
dc.subjectDischarge coefficients
dc.subjectMicrodevices
dc.subjectMicronozzles
dc.subjectMicrotubes
dc.subjectSonic flow
dc.subjectFlow control
dc.titleCritical parameter determination of sonic flow controller diamond microtubes and micronozzles
dc.typeArtigo


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