Dielectric and ferroelectric properties of PZT and PT thin films for saw sensors applications

Trabalho apresentado em evento

Fecha

2004-12-01

Registro en:

Proceedings - Electrochemical Society, v. 3, p. 319-324.

http://hdl.handle.net/11449/68062

2-s2.0-17044364352

6725982228402054

1525717947689076

http://repositorioslatinoamericanos.uchile.cl/handle/2250/3917645

Autor

Universidade Estadual Paulista (Unesp)

Institución

Universidade Paulista Júlio de Mesquita Filho (Brasil)

Resumen

It is very important for the building of the SAW devices to study dielectric and ferroelectrics properties because every SAW device is based in piezoelectric effect that it is made up to transform an electric sign in the mechanical or acoustic sign and a mechanical or acoustic sign in an electric sign. Thus, the purpose of the present work is to prepare PbZr 0,53Ti0.47O3 (PZT) and PbTiO3 (PT) thin films on the Si (100) substrates across spin-coating using a chemical method based in polymeric precursors. After conventional treatment in the furnace, the films were characterized by impedance spectroscopy and hysteresis loops to know its dielectric and ferroelectric properties.