Surface amorphization in diamond turning of silicon crystal investigated by transmission electron microscopy

dc.contributorUniversidade de São Paulo (USP)
dc.contributorUniversidade Estadual Paulista (Unesp)
dc.contributorUniversidade Federal de São Carlos (UFSCar)
dc.date.accessioned2014-05-27T11:19:56Z
dc.date.accessioned2022-10-05T17:41:51Z
dc.date.available2014-05-27T11:19:56Z
dc.date.available2022-10-05T17:41:51Z
dc.date.created2014-05-27T11:19:56Z
dc.date.issued2000-08-01
dc.identifierJournal of Non-Crystalline Solids, v. 272, n. 2-3, p. 174-178, 2000.
dc.identifier0022-3093
dc.identifierhttp://hdl.handle.net/11449/66210
dc.identifier10.1016/S0022-3093(00)00236-2
dc.identifierWOS:000089190900011
dc.identifier2-s2.0-0345852367
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/3916028
dc.description.abstractSilicon crystal exhibits a ductile regime during machining prior to the onset of fracture when appropriate cutting conditions are applied. The present study shows that the ductile regime is a result of a phase transformation which is indirectly evidenced by the amorphous phase detected in the machined surface. Transmission electron microscopy (TEM) planar view studies were successfully performed on monocrystalline silicon (1 0 0) single point diamond turned. TEM electron diffraction patterns show that the machined surface presents diffuse rings along with traces of crystalline material. This is attributed to crystalline silicon immersed in an amorphous matrix. Furthermore, only diffuse rings in the diffraction patterns of the ductile chip are detected, indicating that it is totally amorphous. © 2000 Elsevier Science B.V. All rights reserved.
dc.languageeng
dc.relationJournal of Non-Crystalline Solids
dc.relation2.488
dc.relation0,722
dc.rightsAcesso restrito
dc.sourceScopus
dc.titleSurface amorphization in diamond turning of silicon crystal investigated by transmission electron microscopy
dc.typeArtigo


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