Artigo
High dielectric constant of SrTiO3 thin films prepared by chemical process
Fecha
2000-10-01Registro en:
Journal of Materials Science. Dordrecht: Kluwer Academic Publ, v. 35, n. 19, p. 4783-4787, 2000.
0022-2461
10.1023/A:1004816611050
WOS:000089053600005
Autor
Universidade Federal de São Carlos (UFSCar)
Universidade Estadual Paulista (Unesp)
Resumen
SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700 degrees C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. SrTiO3 thin films were found to have paraelectric properties with C-V characteristics. (C) 2000 Kluwer Academic Publishers.